摘要
紫外线杀菌装置在电子工业高纯水制造工艺中得到广泛应用。本文对紫外线杀菌原理、杀菌效果的影响因素、杀菌装置的构造等方面进行了讨论,并介绍了近年来开发的箱内浸水式杀菌装置。
UV radiation installation for sterilization is widely used in high - purity water production process. The principle of UV radiation for sterilization, the influence factor for sterilization effect and the structure of the installation are discussed and the newly developed installation of immerseable type is introduced.
出处
《洁净与空调技术》
2002年第3期17-20,共4页
Contamination Control & Air-Conditioning Technology
关键词
电子工厂
高纯水
紫外线
杀菌
饮用水
Electronic factory High - purity water UV radiation technology for sterilization
