摘要
内容涉及洁净厂房内高纯气体系统的管道合理设计,正确施工安装及科学运行管理等技术措施。
The text relate to the proper design, right installtion and scientific management of high - purity gas piping system in cleanroom.
出处
《洁净与空调技术》
2002年第3期38-45,27,共9页
Contamination Control & Air-Conditioning Technology
关键词
洁净厂房
气体管道
强度
试验
Election of pipe material Main point of installation Strength test Test and acceptance
