半导体设备回转构件平衡技术分析

The Balancing Technology Analysis of Semiconductor Equipments'Rotating Components

随着国内半导体设备行业技术的迅速发展 ,对回转构件的平衡精度要求越来越高 ,尤其在硅加工行业中表现尤为突出 ,针对半导体设备的平衡精度要求 ,系统阐述了机械平衡的重要性 ,工程设计中平衡精度选择方式 ,刚性回转构件的平衡计算以及在实践中对一般。

With the rapidly development of inland semiconductor equipments'trade technology, rotating components' balancing precision is in higher demand, especially outstanding on silicon crystal process trade, systematically states the importance of mechanical balancing about the balancing precision demand of semiconductor equipments, the choice mode on the balancing precision during engineering design, the balancing computing on the rigid rotating components and introduces that the practical dynamic ? static balancing means on the common and special rotators.