基于CCD激光干涉微位移测量系统准确度分析

Accuracy analysis of laser micro-displacement measurement system based on CCD

条纹处理是微位移测量系统的关键 ,从条纹去噪入手 ,分别介绍了去噪装置、判向变频系统及条纹的细分方法 ,有效地解决了传统系统中由于噪声、位移方向误判等因素造成的错误计数 ,提高了系统测量的准确度。同时对系统测量准确度进行了深入分析。

Stripe handling is the key of micro displacement measure,the ways of eliminating noise,frequency conversion and differentiating direction are introduced,the problem of system is solved,the precision of system is improved.At the same time,the precision of system is analysed deeply.