摘要
特种气体在电子行业、石油化工、医药卫生等领域发挥了巨大的作用。主要阐述了我国电子气体、高纯气体、标准气体的发展现状,并论述了其应用领域。
Specialty gas have played great role in the fields of electronics industries,petro-chemical,medication and so on.The status and the application of high purity gas for electronic gas,petro-chemical and standard gas is reviewed briefly.
出处
《气体分离》
2011年第6期30-33,共4页
Gas Separation
关键词
特种气体
现状
应用
specialty gas
status
application
