焰熔法生长金红石单晶体生长室内温度分布的数值模拟

Numerical Simulation of Temperature Distribution in Growth Chamber for Preparation of Rutile Single Crystal with Flame Fusion Method

以氢气和氧气的燃烧为基础,研究了焰熔法生长金红石单晶体过程中生长室内的温度分布特征,分析了H_2和O_2流量对温度分布的影响。结果表明:中心轴向温度随喷嘴距离的增加而升高,在距喷嘴92 mm处达到最高温度3290.3 K后开始下降;晶体熔帽径向温度随直径的增加逐渐减小,熔帽边缘温度则急剧升高;随着H_2流量增加,生长室内中心轴向和径向温度逐渐增大,H_2流量增加2 L/min,中心最高温度平均升高130℃,最高温度的位置向下移3.1mm,晶体熔帽表面温度平均升高70℃;增加内O_2和外O_2流量均导致生长室内中心轴向和径向温度降低,而使晶体熔帽上的压力升高,外O_2对温度的影响较大,而内O_2对晶体熔帽压力的影响较大。

Temperature distribution in growth chamber for preparation of rutile single crystal with hydrooxygen flame fusion method was investigated,and the effects of oxygen and hydrogen flow rate on temperature distribution were analyzed. The results show that the axial temperature increases with the increasing distance from the nozzle,and the maximal temperature,3290. 3 K,is reached at 92 mm from the nozzle. The radial temperature of the melted cap of crystal decreases with the increasing diameter of crystal,and the temperature of the edge of melted cap of crystal increases sharply. With the increasing hydrogen flow rate,the axial and radial temperature increase gradually in the growth chamber,and the position of the peak temperature gradually moves down 3. 1 mm when the hydrogen flow rate increases for 2L / min,while the axial peak temperature and the temperature of melted cap rise 130 ℃ and 70 ℃,respectively. With the increasing inner and outer oxygen flow rate,the axial and radial temperature decrease and the pressure of melted cap of crystal increase gradually in the chamber. Compared with the inner oxygen,the outer oxygen has large effect on the axial and radial temperature and little effect on thepressure of melted cap of crystal.