溶胶-凝胶法制备二氧化硅无机膜的工艺研究

Technology Study on SiO_2 Inorganic Membranes Prepared by Sol-Gel Method

以正硅酸乙酯为原料,乙醇为溶剂,盐酸为催化剂,N,N-二甲基酰胺为模板剂,采用溶胶-凝胶工艺在Al2O3基体上制备SiO2无机膜。考察了涂膜方式、溶胶的醇硅物质的量比及停放时间对膜性能的影响。结果表明,采用浓稀结合的方式涂膜可提高制膜效率及膜的性能;较大的醇硅物质的量比虽然可以获得较好的膜,但制膜周期较长;溶胶停放时间过长,会使膜的性能下降。

SiO2 inorganic membranes were prepared on Al2O3 wafer substrates by Sol-Gel method using TEOS as raw material,alcohol as solvent,hydrochloric acid as catalyst and N,N-dimethylform amide as template.The effect of coating method,alcohol-silicon molar ratio of sol and retention time on performance of the sol were systematically analyzed.The results show that using combination of concentrated-dilute coating method can improve coating efficiency and performance of the membranes.Though larger alcohol-silicon molar ratio can get better membranes,the cycle of membranes preparation is longer.Retention time of the sol is too long,so that performance of the membranes will decrease.