阳极连接中碱金属双离子迁移模型

Double Mobile Alkali Ion Model for Anodic Bonding

在假设玻璃中仅有两种可动碱金属离子的情况下 ,提出了一个金属 玻璃电场辅助阳极连接模型。根据该模型 ,玻璃中的Na和K耗尽层厚度在演化过程中成比例 ,它们的演化规律决定于耗尽层边上的负电荷层。数据拟合结果表明 ,文献 [4 ]中的Na、K耗尽层厚度与连接时间的关系可用时间的对数函数很好地描述。K富集层起因于K+ 离子的中和 ,Na耗尽层边上的负电荷产生的电场引起了实验中测得K+ 离子跃迁激活能与Na+ 离子的激活能几乎相等。阳极连接过程中不存在稳态 ,总可观测到微小电流 。

Under the assumption of only tow kinds of mobile alkali ions in glass, a model for the metal glass electric field assisted anodic bonding is proposed. According to the model, the depth of K depletion layer is proportional to the depth of Na depletion layer, and the evolution of the depletion layers is determined by negative charges at the edges of the depletion layers. Data fits show that the relation between the bonding time and depths of Na and K depletion layers in reference can well be described by a logarithmic function of the bonding time. The K pile up layer results from the neutralization of K\++ and negative ions. Electric field generated by the negative charge at the edge of Na depletion layer causes the activation energy of K\++ and Na\++ to be nearly equal in experiments. No steady state exists during anodic bonding, and a small current, which is due to ionic conductivity, can always be detected.