摘要
本文讨论和叙述了导热油循环冷却的综合利用 ,导热油循环冷却与自来水冷却多晶硅还原炉在节能降耗方面的比较 。
Comprehensive utilization of heat conduction oil cycl cooling,heat conduction oil cycl cooling comparing with water cooling of polysilicon reduction furnace in economizing electricity and raw materials,relationship between heat conduction oil cycl cooling and improving the polysilicon quality are discussed and narrated in this paper.
出处
《四川有色金属》
2002年第3期41-43,共3页
Sichuan Nonferrous Metals
关键词
节能降耗
导热油
循环冷却
还原炉
多晶硅
economizing electricity and raw materials
heat conduction oil
cycl cooling
reduction furnace
