摘要
介绍了晶粒扫描技术和广度优先搜索算法,研究了使用广度优先搜索算法进行晶粒扫描的应用条件和编程实现方法。该方法需要CCD系统一次识别9颗晶粒,扫描过程中不走空位,有助于提高设备的效率。
It introduces wafer scan and breadth-first search, and researches conditions and program method of wafer scan based on breadth-first search. T his wafer scan method needs nine wafers identification of CCD ,and does notreach to em pty position,so itcan im prove efficiency ofdevice.
出处
《电子工业专用设备》
2014年第10期41-44,共4页
Equipment for Electronic Products Manufacturing