三浮陀螺有源磁悬浮位置信号采集电路研究

Research on Active Magnetic Bearing Position Detecting Circuits with Three-floated Gyroscope

三浮陀螺仪对磁悬浮定中精度提出ε≤0.27μm要求,位移信号采集电路的灵敏度应该高于该要求,电路设计目标定为0.09μm,可以从位置信号采集电路L-R电桥、调理电路和A/D转换电路三部分保证这一目标。给出了两种最佳匹配电阻的估算方法,基于实测电感带入经典公式估算法和电磁仿真软件FLUX估算法,结果表明实验测试的最佳匹配电阻一般高于估算值约30%。推导了调理电路性能指标和A/D转换电路位数与定中精度的关系,结合试验验证了电路设计指标优于0.09μm,完成电路设计任务。

High precisionε ≤ 0.27μm of active magnetic bearing(AMB) is requested in three-floated gyroscope(TFG),and that of position signal detecting circuits should be higher than it,which is devised 0.09μm.Three aspects measures can be done to ensure this goal,L-R circuit,recuperating module and A/D transforming module.Two methods of finding the best resistances are introduced,simulation and calculation with experiment.The relation precision between of orientation and parameter of position signal detecting circuits has been deduced in this paper.And,the index of circuits is realized,proving that is superior to 0.09μm by calculation and experiment.