MEMS惯性器件工程化测试体系研究

Research of Mass Production Testing System for MEMS Inertial Component

由于低成本和高可靠性的优势,MEMS惯性器件被广泛用于军事、汽车、消费类电子等领域。但是国内目前无法实现工程化和批量化生产,国产MEMS惯性器件的市场占有率增速缓慢。分析了制约国产MEMS惯性器件工程化的瓶颈,设计了一套用于批量化生产的测试系统,该系统已经过实际生产验证,具有自动化和高效率的优势。该系统能有效降低生产成本,加速解决MEMS惯性器件工程化问题。

MEMS inertial component is widely used in the fields of military, automotive industry and consumer electronics, due to the advantages of low cost and high reliability. However, the growth of market share of domestically produced MEMS is restricted by the mass production ability of domestic manufacturers. By rooting the reasons limit the mass production, this paper introduces an automatic testing system which can be use in the mass production of MEMS inertial component, and is proved useful to lower production costs. Software and hardware schematics are described in the paper.An advanced technology called system identification is used to enhancing testing ability in the system.