微型石英音叉谐振陀螺抗冲击的建模与仿真

Modeling and Simulation of Shock Resistance of Micro Quartz Tuning Fork Resonant Gyroscope

随着微机电系统技术的飞速发展,微型石英音叉谐振陀螺在各个领域中的应用越来越广泛,工作环境也越来越复杂,有些工作环境非常恶劣,需要经受冲击环境的考验。针对微型石英音叉谐振陀螺结构中'V'字梁在抗冲击方面的设计问题,基于国家标准中的归一化冲击响应谱,利用有限元分析仿真软件COMSOL Multiphsics,分析了不同'V'字梁厚度参数在受到6个方向的1500g、2ms的半正弦冲击时产生的应力和形变。仿真结果表明,当'V'字梁厚度为100μm时,其受到Z+方向的冲击产生的应力为83.045MPa;当'V'字梁厚度为60μm时,其受到Z-方向的冲击产生的应力为149.032MPa;当'V'字梁厚度为80μm时,其受到Z-方向的冲击为94.721MPa。由于石英材料的断裂强度为95MPa,所以'V'字梁的厚度最小值约为80μm。

With the rapid development of micro electronics mechanical system technology,micro quartz tuning fork resonant gyroscope is more and more widely used in various fields,and its working environment is becoming more and more complex.Some working environments are very bad and need to withstand the test of shock environment.Aiming at the design in shock resistance of V-shaped beam in micro quartz tuning fork resonant gyroscope,based on the normalized shock response spectrum of national standard,the stress and deformation of different V-shaped beam thickness parameters under half sinusoidal shock of 1500 g and 2 ms in six-directions are analyzed by using finite element analysis simulation software COMSOL Multiphsics.The simulation results show that when the thickness of the V-shaped beam is 100μm,the stress generated by the shock in the Z+direction is 83.045 MPa.When the thickness is 60μm,the stress generated by the shock in the Z-direction is 149.032 MPa.When the thickness is 80μm,the impact in the Z-direction is 94.721 MPa.Due to the breaking strength of the quartz material is 95 MPa,the minimum thickness of V-shaped beam is about 80μm.