用SAM对外引线沾污引起器件失效的研究

The study of the Ingredients of contamination that result in the Invalidation of semiconductor device analyed by means of SAM

本文主要介绍了以扫描俄歇微探针为手段，对由于器件外引线受污染引起的失效进行分析。运用电化学理论，探讨了由此产生的失效机理，并就电化学反应条件对器件失效成因的影响进行了讨论。

The ingredients of contamination that result in the invalidation of serniconductordevice has been analyed hy means of SAM (Scaanning Auger Micropoprobe). According to thetheory of electrochemistry, the mechanism of invalidation and the influence of electrochemistryaction condition have been discussed.