硅流量传感器的发展

The Development of Silicon Flow Sensor

概述了近年发展起来的、利用热传导原理的固态硅流星传感器。这类传感器具有灵敏度高、响应快、易于智能化、批量化和造价低等特点。适用于小流量测量。

This paper reports the development of solid silicon flow sensor which based upon thermal transfer principle in the decade. The sensor are characterized by high sensitivity, fast response, intelligence and lower cost. It's used for the measurement of small flow.