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响应表面法在工艺综合中的应用 被引量：2

Using Response Surface Method for Process Synthesis
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摘要 通过实例 ,介绍多分区响应表面法的优点及其给工艺综合带来的好处 ,并用其构建的响应表面模型分析工艺窗口带来的影响 . To take place the process and device simulator,a new RSM,named multi-region RSM,is developed,which integrated into the MOSPAD system.The advantage of MR-RSM is presented,and the analysis of process window is also based on the MR-RSM.
作者 鲁勇 张文俊 杨之廉
机构地区 清华大学微电子学研究所
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第10期1116-1120,共5页 半导体学报（英文版）
关键词 响应表面法 多分区响应表面法 工艺综合 MOSPAD 工艺窗口 半导体集成电路 response surface method MR-RSM process synthesis MOSPAD process window
分类号 TN405 [电子电信—微电子学与固体电子学]
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参考文献7

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同被引文献17

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引证文献2

二级引证文献2

Journal of Semiconductors
2002年 第10期

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