摘要
通过实例 ,介绍多分区响应表面法的优点及其给工艺综合带来的好处 ,并用其构建的响应表面模型分析工艺窗口带来的影响 .
To take place the process and device simulator,a new RSM,named multi-region RSM,is developed,which integrated into the MOSPAD system.The advantage of MR-RSM is presented,and the analysis of process window is also based on the MR-RSM.