摘要
介绍的一种反磁悬浮涡流旋转微陀螺的定子研究。利用现有实验设备,通过多次实验摸索,找到了一条实现反磁悬浮涡流旋转微陀螺下定子合理的工艺路径,并进行了测试,测试显示定子结构完整正常。
A microgyroscope stator with diamagnetic levitation and eddy current rotation was presented.Using present laboratory equipments,the author finds a appropriate way to manufacture the gyroscope bottom stator through several tries was found.Finally,the testing experiment of the stator shows that the structure is absolutely perfect.
出处
《微细加工技术》
2008年第6期45-47,共3页
Microfabrication Technology
基金
国家自然科学基金资助项目(60402003)
国防预研基金资助项目(9140A09020706JW0314)
关键词
微陀螺
反磁悬浮
涡流旋转
下定子工艺
microgyroscope
diamagnetic levitation
eddy current rotation
bottom stator process
