碳纳米管场电子发射性能不稳定性的分析

Analysis of Instability of Field Electron Emission from Carbon Nanotubes

利用等离子体增强热丝化学气相沉积制备了多壁碳纳米管,并测试了它的场电子发射性能,发现碳纳米管的场电子发射性能在测量过程中发生了变化。利用X射线能谱仪对碳纳米管进行了表征,结果表明氧吸附在碳纳米管上。氧的吸附导致了碳纳米管的功函数发生了变化,造成碳纳米管场电子发射性能不稳定。同时,本工作还分析了氢的吸附可能对碳纳米管场电子性能的影响。因此,本工作对碳纳米管在微电子领域的应用有一定的意义。

Multiwalled carbon nanotubes were synthesized by plasma-enhanced hot filament chemical vapor deposition and their characteristics of field electron emission were measured.It is found that the characteristics are changed.After they were characterized by energy dispersive X-ray,the result indicates that oxygen is adsorbed on them.The adsorption of oxygen results in the change of work function of carbon nanotube so that the characteristics become instable.Simultaneously,the possible effects of the adsorption of hydrogen on their characteristics of field electron emission were analyzed as well.So,it is believed that this work is significance for applications of carbon nanotubes in the field of microelectronics.