多层共烧金属化氮化铝陶瓷工艺研究

Research of Multilayer Metallization and Co-fired AlN Ceramic Processes

氮化铝陶瓷具有热导率高、绝缘性好以及无毒害等特点,由于可以多层布线和金属化共烧,因此在很多领域有着越来越广泛的应用。该文介绍了多层共烧金属化氮化铝陶瓷的工艺方法,重点介绍了印刷、叠片层压、烧结、镀覆工艺以及其性能检测方法等方面的研究。通过上述研究可以生产热导率高、金属化电阻率低且附着力强的多层共烧陶瓷产品。

AlN ceramic has high thermal conductivity,good insulativity and non-toxcity.It can co-fire with multilayer metallization,so it is widely used in many fields.This paper introduces the processes of the multilayer metallization and co-fired AlN ceramic.The study of printing,stacking and lamination,sintering,plating and the test method was introduced with emphasis.Through above studies,we can pro duce multilayer co-fired AlN ceramic with high thermal conductivity and its metallization has low electrical resistivity and high adhesion.