MEMS陀螺仪中不匹配干扰抑制方法的研究

The Method of Mismatched Interference Suppression in MEMS Gyroscope

MEMS传感器从最早的汽车电子到近些年来的消费电子,如今凭借着物联网时代的助推,已经掀起市场浪潮。但微机械陀螺传感器存在着各种非理想效应,其中静电驱动电容式微机械陀螺仪的主要不匹配干扰效应大致可以分为正交误差和同相误差这两大类。本文分析了微机械陀螺仪正交误差、同相误差产生的原因,根据微机械陀螺仪动力学方程在Simulink中进行仿真。根据仿真结果可以分析得到,微机械陀螺仪的干扰误差大部分是由正交误差造成的,严重影响了陀螺仪的性能,然而同相误差对陀螺仪性能的影响则相对小很多,可以忽略不计。本文基于微机械陀螺仪角速度信号提取原理,首先分析了不匹配干扰效应产生的干扰信号与目标角速度信号之间的差异,然后针对正交误差的不匹配信号提出了有效的消除方案。

MEMS sensor, from the earliest automotive electronics to consumer electronics in recent years, is now rising with the help of the Internet of things era. However, there are various non ideal effects in the micromachined gyroscope sensor, of which the main mismatched interference effects of the electrostatic driven capacitive micromechanical gyroscope can be divided into two major categories: orthogonal and phase error. This paper analyzes the causes of quadrature error and phase error of MEMS gyroscope,and simulates it in Simulink based on the dynamic equation of MEMS gyroscope. According to the simulation results, it can be found that the interference error of the micromachined gyroscope is mostly caused by the orthogonal error, which seriously affects the performance of the gyroscope. However, the effect of the phase error on the performance of the gyroscope is much smaller and can be ignored. Based on the extraction principle of the angular velocity signal of the micromachined gyroscope, the difference between the interference signal and the target angular velocity signal produced by the mismatched interference effect is first analyzed,and an effective elimination scheme is proposed for the mismatched signal of the orthogonal error.