摘要
原子力显微镜是广泛应用的纳米测量仪器。中国计量科学研究院成功研制了计量型原子力显微镜纳米测量系统,本文介绍了该系统的技术特点和指标,并通过与发达国家的比对测试验证了该系统在测量原理、测量精度及可溯源性方面已达到了国际先进水平。
The AFM is one of important and useful nanomeasuring instruments,we have developed the metrological AFM of nanomeasuring system at NIM.This paper described the metrological characteristics and targets of the system,the measuring principle、accuracy、traceability of the system have been proved by comparison with PTB,that they have been achieved the advanced international level.
