医用μTAS微型葡萄糖生物传感器中的微加工技术

Study on Key Techniques of Glucose Sensor Applied to μTAS for Medical Purpose

研制了一种基于 IDA薄膜电极的微型葡萄糖生物传感器 ,结合该传感器 IDA薄膜电极的加工 ,介绍了目前 μTAS加工中的微加工技术。

The design and fabrication of micro glucose sensor, which is based on IDA (Interdigital Array) electrode was presented in this paper. And general design and fabrication technique in μTAS was reviewed in this paper combined with the study of fabrication of the microelectrode.