准分子激光加工表面微观形貌测量和数据处理方法研究

Micro-Topography Measurement for Excimer Laser Processing Surface and Its Data Processing Approaches

用紫外波长为 λ=2 4 8nm的准分子激光器 ,分辨率为 5 0 nm的精密微动工作台及其控制器 ,在一定的工艺参数下 ,对 Al2 O3陶瓷、不锈钢等材料表面分别进行准分子激光加工 ,构建准分子激光加工表面微观形貌。对加工表面的几何形貌分别采用扫描电子显微镜 ( SEM)、表面形貌仪进行测量 ,并通过对 SEM图像的 3维数字化处理 ,得出表面 3维形貌图。同时用Mat L ab处理表面形貌仪的测量数据和计算表面形貌统计参数。

Under a group of controlled processing parameters, surfaces of Al 2O 3 ceramic and stainless steel are processed by an excimer laser with ultraviolet wave length as λ =248nm,working together with a precise micro-stroke worktable with resolution as 50nm. The designed micro-topography surfaces are obtained. They are measured by Scanning Electronical Microscope (SEM) and surface topography measuring instrument. Further more, the SEM images are transformed to a 3-dimensional surface topography image by a 3-dimensional digital processing approach, which can be realized to carry out the similar function of an expensive Atomic Force Microscope (AFM). Besides, MatLab software is adopted to process the data from surface topography measuring instrument, and to calculate the statistic parameters.