摘要
用紫外波长为 λ=2 4 8nm的准分子激光器 ,分辨率为 5 0 nm的精密微动工作台及其控制器 ,在一定的工艺参数下 ,对 Al2 O3陶瓷、不锈钢等材料表面分别进行准分子激光加工 ,构建准分子激光加工表面微观形貌。对加工表面的几何形貌分别采用扫描电子显微镜 ( SEM)、表面形貌仪进行测量 ,并通过对 SEM图像的 3维数字化处理 ,得出表面 3维形貌图。同时用Mat L ab处理表面形貌仪的测量数据和计算表面形貌统计参数。
Under a group of controlled processing parameters, surfaces of Al 2O 3 ceramic and stainless steel are processed by an excimer laser with ultraviolet wave length as λ =248nm,working together with a precise micro-stroke worktable with resolution as 50nm. The designed micro-topography surfaces are obtained. They are measured by Scanning Electronical Microscope (SEM) and surface topography measuring instrument. Further more, the SEM images are transformed to a 3-dimensional surface topography image by a 3-dimensional digital processing approach, which can be realized to carry out the similar function of an expensive Atomic Force Microscope (AFM). Besides, MatLab software is adopted to process the data from surface topography measuring instrument, and to calculate the statistic parameters.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2002年第19期1692-1695,共4页
China Mechanical Engineering
基金
国家自然科学基金资助重点项目 (5 0 13 5 0 40 )
江西省自然科学基金资助项目 (0 2 5 0 0 18)
江西省教育厅资助科技项目
关键词
数据处理
准分子激光加工
表面微观形貌
统计参数计算
3维数字化处理
excimer laser processing surface micro-topography statistic parameters 3-dimensional digital processing approach