H_2C_2O_4稳定剂对Sol-Gel法制备LiNbO_3薄膜的影响

Infection of H_2C_2O_4 as stabilizers on the LiNbO_3 thin films fabricated by sol-gel process

研究了分别以H2 C2 O4 、HNO3、HCOOH和CH3COOH作稳定剂的LiNbO3薄膜先驱液的稳定性 ,发现H2 C2 O4 作稳定剂的先驱液的稳定性最好 ;用sol gel法在Si(110 )基板上制备了以H2 C2 O4 作稳定剂的LiNbO3薄膜 ,并对LiNbO3薄膜进行了IR、XRD和SEM表征 ,结果表明 ,生成的LiNbO3为多晶 ,与HNO3相比 ,以H2 C2 O4 作稳定剂制备的LiNbO3薄膜形貌较差。

In this paper, we studied the stability of LiNbO 3 precursor solution stabilized by H 2C 2O 4,HNO 3,HCOOH and CH 3COOH,respectively, found that the stability of LiNbO 3 precursor solution stabilized by H 2C 2O 4 was the best. LiNbO 3 thin films on Si(110) substrate were prepared by the stabilized solutions through sol gel process. The LiNbO 3thin films were characterized by IR, XRD and SEM, the results were shown that the obtained LiNbO 3 thin films were polycrystalline,and the morphology of LiNbO 3 thin films stabilized by H 2C 2O 4 was not good as that of LiNbO 3 thin films by HNO 3.