鍺中扩散层表面浓度的測量

DETERMINATION OF THE SURFACE CONCENTRATION OF DIFFUSED LAYERS IN GERMANIUM

本文导出了鍺中杂质扩散层霍尔系数R的表示式。计算了余误差函数分布和高斯分布扩散层的霍尔系数与扩散层表面浓度N_S的关系曲线。用霍尔效应和平均电导法测量了锗中砷扩散层的表面浓度。

The average surface Hall coefficient R of diffused layers in germanium is derived., Curves giving R as function of surface concentration N, have been calculated for two forms of diffusive distribution, namely: the complementary error function and the Gaussian distribution. By measuring the Hall coefficient and electric conductivity of the surface, the concentration of arsenic diffused layers in germanium is determined.