固体科学中的电子显微学

ELECTRON MICROSCOPY IN SOLID STATE SCIENCES

电子显微镜自1932年问世以来,经过半个世纪的发展,不但作为显微镜主要指标的分辨率已由开始时的一百埃提高到2—3埃,可以直接分辨原子,并且还能进行毫微米(10埃)尺度的晶体结构及化学组成的分析,成为全面评价固体微观特征的综合性仪器。电子显微镜在固体科学中的应用经历了三个高潮:首先是50～60年代的薄晶体中位错等晶体缺陷的衍衬象的观察;其次是70年代的极薄晶体的高分辨结构象及原子象的观察;还有就是近几年来兴起的分析电子显微学,对几十埃区域的固体,用X射线能谱及电子能量损失谱进行成分分析以及用微束电子衍射进行结构分析。这些成就无疑地将推动包括固体物理、固体化学、固体电子学、材料科学、地质矿物、晶体学等学科在内的固体科学的发展。

The first electron microscope appeared in 1932 and after continuons improvements during the past 50 years it has become now a comprehensive instrument for micro-cha- racterization of solids.Besides being capable of direct imaging of single atoms at a re- solution of 2-3(?),it can also make structural as well as chemical analyses in the nano- meter range. There are three main developments of electron microscopy in solid state sciences. First was the diffraction contrast studies of defects such as dislocations in thin crystals starting in the fifties;then the high resolution atomic imaging and structural images of very thin crystals in the seventies;and last the newly appeared analytical electron micro- scopy consisting mainly of X-ray energy dispersive spectroscopy and electron energy loss spectroscopy as well as micro-electron diffraction in the nanometer range.These achievements no doubt will enhance the progress of all branches of solid state sciences, such as solid state physics,solid state chemistry,solid state electronics,material scie- nces,geology and mineralogy,crystallography,etc.