纳米硬度技术的发展和应用

DEVELOPMENTS AND APPLICATIONS OF NANO-HARDNESS TECHNIQUES*

摘 要 近二十年来,主要用于检测材料表面微米和亚微米尺度力学性质的纳米硬度技术发展迅速.首先,概述硬度的定义、分类及其适用范围.然后,系统地总结纳米硬度技术的发展,重点介绍纳米压痕硬度的测量原理及其影响因素,连续刚度测量原理,高分辨率的载荷位移测量原理,几种常用压头的几何形状,试样表面的准备和确定,相关的测试方法,仪器校准和显微观察等问题.通过压痕实验可获得硬度、弹性模量、断裂韧性、存储模量和损耗模量、蠕变应力指数等.最后,简要介绍纳米划痕硬度测量技术的发展和应用.

Great strides have been made over the past two decades in the development of techniques for studying the mechanical properties of materials on the micron and submicron levels. In this review paper, first, several definitions, classifications and their scopes used for hardness are introduced. Secondly, developments for nanoindentation techniques are summarized, especially the measuring principles of nanoindentation, CSM(Continuous Stiffness Measurement), high resolution load/displacement sensors, several typical tips, sample preparation, reference to the point of contact, experimental methods, instrument calibration and so on. With nanoindentation systems, quantitative data can be obtained: hardness, elastic modulus, fracture toughness, storage and loss modulus, stress exponent. Finally, advances in nanoscratch techniques are briefly discussed.