Numercial Simulation for Plasma Stream of ECR Plasma Source
Numercial Simulation for Plasma Stream of ECR Plasma Source
摘要
Using a Monte Carlo method and resonable data in our experiment device, we simulate the plasma stream of ECR plasma source on condition that the plasma is collisionless. We can get the distribution of ion density and the effect of magnetic field on the plasma along the divergent magnetic field. The research is beneficial to plasma processing applications.
Using a Monte Carlo method and resonable data in our experiment device, we simulate the plasma stream of ECR plasma source on condition that the plasma is collisionless. We can get the distribution of ion density and the effect of magnetic field on the plasma along the divergent magnetic field. The research is beneficial to plasma processing applications.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1992年第Z1期111-114,共4页
Chinese Journal of Vacuum Science and Technology