摘要
Wc have analyslsed the raw materlals of PZT and its sol and gel by the infrared absorption spectrum. Using sol-gel processing, PZT epitexial thin films with perovskite structure on SrTiO<sub>?</sub>, MgO and sapphire single crystal substrates, and PLT ceramic thin films with pervoskite structure on Si single crystal
出处
《真空科学与技术学报》
EI
CAS
CSCD
1992年第Z1期211-214,共4页
Chinese Journal of Vacuum Science and Technology