摘要
Research about the pumping mechanism of molecular drag pump (MDP) has been made in this paper. After considering the effects of return flow and leakage of gas in MDP to the pump’s performance, and calculating the speed distribution of gas in the rectangle channel by finite difference methods, we pot forward the MDP’s pumping theory, extend the theory of MDP to two-dimensional space at first time, and present its numerical evaluation method.
Research about the pumping mechanism of molecular drag pump (MDP) has been made in this paper. After considering the effects of return flow and leakage of gas in MDP to the pump’s performance, and calculating the speed distribution of gas in the rectangle channel by finite difference methods, we pot forward the MDP’s pumping theory, extend the theory of MDP to two-dimensional space at first time, and present its numerical evaluation method.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1992年第Z1期247-250,共4页
Chinese Journal of Vacuum Science and Technology
基金
This work was partly supported by Sciences Research Funds appropriated from the Chinese Academy of Sciences.
