摘要
根据单面分流四边形电极结构的正方形PSD的原理 ,测试并分析我们研制的 3mm×3mm正方形PSD的性能。给出反偏电压、光谱响应、暗电流、极间电容、极间阻抗、位置分辨率和位置线性特性等性能的测试结果。并在分析位置特性的非线性失真机理的基础上 ,给出位置特性非线性失真的修正方法。
According to the principle of foursquare position sensitive detector of single-sided split-flow and tetra-lateral electrode frame,the performances of 3mm×3mm foursquare position sensitive detector,which developed by our certre,were tested and analyzed.Several test results,such as reverse voltage,photo sensitivity,dark current,terminal capacitance,terminal impedance,position distinguishability,position Iinearity,were reported in the paper.Based on theoretic analysis of the non-linearity distortion mechanism of this device,the method of non-linearity revision for this device is presented in the end of the paper.
出处
《激光与红外》
CAS
CSCD
北大核心
2002年第5期342-344,共3页
Laser & Infrared
基金
浙江省科技计划项目 (0 0 110 14 2 0 )
关键词
四边形电极结构
位置敏感探测器
性能测试
非线性失真
修正
PSD
tetra-lateral electrode frame
position sensitive detector
ferformance test
non-linearity distortion
revision
