摘要
金刚石薄膜的制备与热丝温度、衬底温度、工作室压强及反应气体浓度有关,氢原子具有抑制石墨生长的作用,衬底的表面处理对金刚石薄膜的生长有很大影响。本文还试图用晶体生长和相变理论解释金刚石薄膜的生长过程。
The diamond films are prepared by hot-filament CVD. The feedstock is gaseous butane(C<sub>4</sub>H<sub>10</sub>) and the characteristics of the diamond film are analyzed by its Raman spectrum, scanning electron microscopy and X-ray diffraction spectroscopy. The results show that the quality of these films are related to the tempera- ture of filament and substrate, the proportion of butane to hydrogen and the reactor pressure. Nucleation is affected by the disposition of the surface on the substrate. The mechanism of the growth of the diamond film is tried to be interpreted by the crystal growth and phase transform theories.
出处
《中山大学学报论丛》
1992年第2期11-18,共8页
Supplement to the Journal of Sun Yatsen University
基金
国家自然科学基金
