Pulsed Ion Sheath Dynamics in a Cylindrical Bore for Inner Surface Grid—Enhanced Plasma Source Ion Implantation
被引量：2
参考文献13
1 Conrad J R, Radtke J L, Dodd R A, Worzala F J and Tran N C 1987 J. Appl. Phys. 62 4591
2 Chu P K, Qin S, Chan C, Cheung N W and Larson L A 1996 Mater. Sci. Eng. 17 207
3 Sheridan T E 1993 J. Appl. Phys. 74 4903
4 Sun Me Yang S Z and Li B 1996 J. Vac. Sci. Technol. A 14 367
5 Zeng X C, Liu A G, Kwok T K, Chu P K and Tang B Y 1997 Phys. Plasma 4 4431
6 Liu B, Zhang G L, Cheng D J, Liu C Z, He R and Yang S Z 2001 J. Vac. Sci. Technol. A 19 2958
7 Zeng X C, Tang B Y and Chu P K 1996 Appl. Phys. Lett.69 3815
8 Zeng X C, Kwok T K, Liu A G, Chu P K, Tang B Y and Sheridan T E 1998 IEEE Trans. Plasma Sci. 26 175
9 Sun M, Zhu P and Yang S Z 1996 J. Phys. D 29 274
10 Liu B, Liu C Z, Cheng D J, Zhang G L, He R and Yang S Z 2001 Nucl. Instrum. Methods B 184 644
同被引文献7
1 ZHANGGu-Ling,WANGJiu-Li,LIUYuan-Fu,LIXue-Ming,WUXing-Fang,FANSong-Hua,LIUChi-Zi,YANGSi-Ze.Shadow Effect and Its Revisal in Grid-Enhanced Plasma Source with Ion Implantation Method[J] .Chinese Physics Letters,2004,21(6):1114-1116. 被引量：1
2 WANGJiuli,ZHANGGuling,WANGYounian,LIUYuanfu,LIUChizi,YANGSize.Simulation methods of ion sheath dynamics in plasma source ion implantation[J] .Chinese Science Bulletin,2004,49(8):757-765. 被引量：2
3 张谷令,王久丽,刘元富,刘赤子,杨思泽.Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method[J] .Chinese Physics B,2004,13(8):1309-1314. 被引量：2
4 张谷令,王久丽,吴杏芳,冯文然,陈光良,顾伟超,牛二武,范松华,刘赤子,杨思泽.Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation[J] .Chinese Physics Letters,2006,23(5):1241-1244. 被引量：1
5 刘洪喜,蒋业华,汤宝寅.全方位离子注入与沉积TiN薄膜的纳米压痕和纳米划擦行为[J] .真空科学与技术学报,2010,30(5):545-550. 被引量：5
6 李义,敬晓丹,李久会,雷明凯.工作气压对多脉冲鞘层动力学行为的影响[J] .真空科学与技术学报,2015,35(5):589-593. 被引量：3
7 张谷令,王久丽,杨武保,范松华,刘赤子,杨思泽.内表面栅极等离子体源离子注入TiN薄膜及其特性研究[J] .物理学报,2003,52(9):2213-2218. 被引量：17
引证文献2
1 张谷令,吴杏芳,顾伟超,陈光良,冯文然,牛二武,李立,吕国华,陈皖,范松华,刘赤子,杨思泽.等离子体方法实现金属管件内表面改性研究进展[J] .自然科学进展,2006,16(11):1371-1378. 被引量：1
2 李义,敬晓丹,冯立强.PSⅡ金属圆管内表面改性中的多脉冲鞘层动力学研究[J] .辽宁工业大学学报（自然科学版）,2016,36(6):351-355.
1 王久丽,张谷令,刘元富,王友年,刘赤子,杨思泽.Influence of ion species ratio on grid-enhanced plasma source ion implantation[J] .Chinese Physics B,2004,13(1):65-70.
2 SHEN Dingyu,CHEN Jian,ZHAO Qiang,WANG Xuemei(Department of Technical Physics and institute of Heavy Ion Physics, Peking University,Beijing 100871).Study of point defect detectors in Si[J] .Nuclear Science and Techniques,1999,10(2):111-115.
3 Zhijun SHEN,Xiao LI,Jian REN.Comparisons of some difference forms for compressible flow in cylindrical geometry on arbitrary Lagrangian and Eulerian framework[J] .Applied Mathematics and Mechanics(English Edition),2016,37(11):1571-1586. 被引量：1
4 原保全,马丽.磁微极流体方程组在临界Sobolev空间强解的存在性[J] .应用数学学报,2016,39(5):709-718. 被引量：1
5 Yan JIA,Xing-wei ZHANG,Wen-liang ZHANG,Bo-qing DONG.Remarks on the Regularity Criteria of Weak Solutions to the Three-dimensional Micropolar Fluid Equations[J] .Acta Mathematicae Applicatae Sinica,2013,29(4):869-880. 被引量：1
6 GALA Sadek,YAN Jia.Two Regularity Criteria Via the Logarithm of the Weak Solutions to the Micropolar Fluid Equations[J] .Journal of Partial Differential Equations,2012,25(1):32-40.
7 项农,胡业民,欧靖.Bohm Criterion for Collisionless Sheaths in Two-Ion-Species Plasmas[J] .Plasma Science and Technology,2011,13(4):385-391. 被引量：1
8 Lattice Strain Induced by Ion Implantation in AlGaAs/AlGaInAs Quantum Well Samples[J] .Chinese Physics Letters,2002,19(4):599-601. 被引量：1
9 M. K. Mishra A. Phukan.Effect of Discharge Voltage on an Ion Sheath Formed at a Grid in a Multi-Dipole Discharge Plasma[J] .Chinese Physics Letters,2008,25(3):1011-1014.
10 原保全.REGULARITY OF WEAK SOLUTIONS TO MAGNETO-MICROPOLAR FLUID EQUATIONS[J] .Acta Mathematica Scientia,2010,30(5):1469-1480. 被引量：14
