用亚像素技术实现集成块引脚位置偏差的测量

A High-accuracy Measurement of IC Chip Pin Positions Deviation Based on Subpixel Techniques

对引脚边缘轮廓进行提取 ,采用亚像素细分的方法 ,使引脚边缘测量精度达到亚像素级 ,并利用三次样条插值拟合出引脚边缘灰度的分布函数 ,实现了引脚边缘位置的精确定位。实验证明 ,该方法能够达到集成引脚位置偏差

A new method to measure the IC chip pins position deviation and designs a special optical measurement system was introduced.By getting the chip pins edge sketch and using a method of subpixel precised division,we can measure the chip pins edge at the subpikxel level,and using the method of spline,we can get the grey plot function and presicely measure the position of the edges.The experiments indicate that this method can achieve the 3° measurement index of IC chip pin position deviation.