一种高分辨力角位移传感器量程扩展方法

A Scheme for Extending Measurement Range of Critical Reflection-based Angular Displacement Sensor with High Resolution

提出一种采用多探测光路的角位移量程扩展方案 ,可以在不降低分辨力的条件下 ,将量程扩展多倍 ,使传感器同时具有高分辨力、大量程的优点。结果表明 ,量程扩展到 36 0 ",两光路的分辨力分别为0 .0 0 4 "和 0 .0 0 5 "。

A scheme for extending measurement range of the angular displacement sensor is presented.The measurement range of the sensor can be extended without reducing measurement resolution by using multi receiving optical units,and the sensor meet some practical applications with high measurement resolution and large measurement range.The results show that its measurement range is 360 ' and resolution are 0.004 ' and 0.005 ' respectively.