声表面波滤波器封盖技术的研究

Study on Sealing Process of SAW Filter

声表面波滤波器 (SAWF)广泛应用于有线和无线通讯中。声表面波滤波器的封盖过程对声表面波滤波器的性能有着非常重要的影响。炉内气氛的选择 ,封盖过程中的温度控制 ,炉内气压的控制是影响封盖质量的主要因素。选择氮气 95 %、氢气 5 %的混合气体封盖 ,并采用合适的温度曲线可以得到很好的封盖结果。

SAW filters are used in a variety of wired and wireless applications.The sealing process of SAW filter has great effects on the quality of SAW filter.The atmosphere control,the temperature profile and the pressure control inside chamber are the major factors affecting the sealing result.can be obtained by compound sealing gas(N 2 95%,H 2 5%)and appropriate temperature profile.Very good sealing result