数学式压电石英姿态传感器的研究

Study on the Digit Piezoelectric Quartz Posture Sensor

叙述了数学式压电石英姿态传感器的结构原理与性能。介绍了敏感元件的设计方案 ,设计制作了弹性敏感质量体 ,有效地提高了石英晶体的抗过载能力和抗冲击能力 ;设计制作了结构简单 ,密封效果良好的双劈形挤压密封腔。试验表明 ,采用这种结构形式的姿态传感器 ,其分辨率优于 0 .0 0 14°,非线性度为 0 .13% ,密封腔漏气率小于 2× 10 - 1 1 Pa· m3/

This paper discussed the structural principle and property of digit piezoelectric quartz posture sensor.The design of sensitive structural with volute elastic sensitive mass has been introduced in which quartz crystal has abilities to resist over load and lash effectively raised.The double clind extrusion seal cavity with simple structure and better seal effect has been designed.Experiment shown,the sensor with structures has distinguish ability better 0.001 4 degree,no linearity 0.13% and air leak rate of seal cavity less 2×10 -11 Pa·m 3/s.