摘要
基于参数化的计算机辅助设计 (CAD)软件 ,对硅微机械梳齿静电谐振器进行了实体建模 ,以有限元分析软件为工具 ,进行了谐振器的模态分析、静态分析和谐响应分析 ,初步揭示了谐振器的静、动态特性 ,有助于改善设计效率和质量 ,展示了计算机辅助工程 (CAE)技术在微机电系统 (MEMS)研究中的重要作用。
With the help of the parameter based CAD software, the 3D model of the silicon micromechanical electrostatic comb drive resonator is constructed. The analyses of its modes, static responses and harmonic responses are implemented by the finite element analysis tool and the static and dynamic characteristics of the resonator can be predicted, which is helpful to improving the design quality and efficiency. Thereby the active effect of CAE technology on the development of MEMS is demonstrated.
出处
《压电与声光》
CSCD
北大核心
2002年第5期421-424,共4页
Piezoelectrics & Acoustooptics
基金
总装预研基金资助项目 (0 0 J9.1.8.JW0 60 3 )
