摘要
本文从LIGA工艺的工程应用角度 ,简要介绍微小型安全密码锁机构、微小型加速度开关结构的基本设计问题和工艺问题 。
Based on the viewpoints of engineering applications of LIGA technology, essential design and fabrication challenges of Micro/Milli- safety combination lock mechanisms and Micro/Milli- acceleration switch are briefly presented. Demands and requirements of those two devices' LIGA fabrication process are also outlined in the paper.
出处
《核技术》
CAS
CSCD
北大核心
2002年第10期883-888,共6页
Nuclear Techniques
