基于线阵CCD的全息光栅位移传感器

The Holographic Grating Displacement Sensors Based on Linear CCD

目的 提出了一种新型的基于全息光栅的 CCD位移传感器 .方法 利用 CCD分辨率高 ,像素均匀等特点 ,对干涉条纹的移动进行精确定位 ,利用全息光栅在测量过程中又具有不受光源波长的影响、适用光谱范围宽等特点 ,实现位移的自动精确测量 .结果 系统能够对位移实现自动精确测量 .

Aim\ To present a kind of new CCD displacement sensors based on holographic grating. Methods\ To carrying out accurate location of interfering stripe shift by using high resolution, wide spectrum range and even color characteristic of CCD,the accurate measurement of the stripes can be realized, resulting from the independence of the grating on the wavelength . Conclusions\ The system can be used to realize the automatic accurate displacement measurement.