摘要
利用从金属蒸汽真空弧离子源引出的强束流Ta离子,进行Ta离子注入钢的材料改性研究。研究结果表明,在离子注入剂量为5×1017cm-2,平均束流密度为40μA·cm-2,加速电压为42kV下,Ta离子注入能在钢表面形成厚达80nm的合金层。借助卢瑟福背散射(RBS),我们发现表面合金层中Ta的原子百分浓度在15%以上。
Ta ions extracted from a metal vapor v acuum arc ion source were implanted i nto H13steel with various ion flux densi-ties.Ta concentration depth profil e in H13steel was calculated accordi ng to ion range profile and sputterin g theory.Rutherford back scattering showed that the Ta concentration depth profile in H13ste el wider than that of theory calculation.The thickness of alloy layer about 80nm.
基金
江苏省教育厅自然科学基金资助项目
