摘要
根据用 Talysurf表面轮廓仪测量准分子激光加工 Al2 O3陶瓷表面轮廓的数据 ,用结构函数法分析了准分子激光加工陶瓷表面 ,采用功率谱法计算了准分子激光加工陶瓷表面轮廓的分形维数 ,并把计算所得的分形维数与其轮廓高度的算术平均值和均方根值进行了比较 ,得出它们之间为非线性关系 。
The basic concepts of fractal theory and two calculation approaches for fractal parameters are pressented.Surface profile testing data of excimer laser processing Al 2O 3 ceramic are obtained by the Talysurf surface profile testing instrument.Analysis on its structure function shows that the surface of excimer laser processing ceramic is a fractal surface.Its fractal dimension is compared with the average surface roughness and their nonlinear relationship is conformed and simulated.
基金
江苏省自然科学基金 0 5 2 0 0 18
