压电陶瓷致动补偿式空气支承系统的研究

Research on the System of Air Bearing with Piezoelectric Ceramics

基于现代控制理论 ,提出了一种新型空气支承 ,不改变供气压力 ,利用压电陶瓷(PZT)的伸缩量来补偿空气膜厚度随外部干扰的变化对支承精度的影响 .在建立理论模型的基础上 ,介绍了二维自由度控制器的优化设计方法 ,并对主动空气支承系统的动态特性进行了分析研究 .该系统具有精度高、响应速度快、抗干扰能力强的特点 ,其应用领域相当广泛 .

A new air bearing based on the modern control theory is presented.In this system,the micro displacement of piezoelectric ceramics is used to compensate the bearing's error caused by the vary of air membrane thickness with external interference under the stable pressure of air supply.On the basis of theoretical model,the optimal design about 2 D controller is introduced,and the analysis of dynamic characteristics about bearing system is achieved.Owing advantages--high precision,fast respond and powerful anti interference,this system has a good future to applied industry.