石英晶体在真空镀膜测厚技术中的应用研究

Application Research of Quartz Crystal in the Technology of Thickness Survey under Vacuum State

基于石英晶体振荡原理 ,提出了在真空状态下的一种超薄型镀膜测厚方法 ,介绍了该项测厚技术的基本电气原理 ,研究了测厚过程中石英晶体材料的选取方法和组织实施原则 .石英晶体应具有固定的技术参数 ,并被安放于真空舱内的正确位置 .密闭的石英晶体探头通过同轴电缆与外部振荡器相连 ,振荡器输出的频率信号由微机进行处理 。

Based on the theory of quartz oscillator, a thickness surveying method of overthin cladding material in a state of vacuum is given in this paper, the elementary electrical principle of thickness survey is introduced, and a method selecting quartz crystal materials and an implementing process in principle are studied.A quartz should have regular technical paranieters and be laid in an appropriate vacuum cabin. The airtight quartz detector and outside oscillatory are connected by a coaxial cable, a export frequency signal of oscillatory will be handled by the microcomputer and transformed into thickness data.