64×64元InSb红外焦平面读出电路研制进展

Design and fabrication of readout integrated circuits for 64×64 InSb IR focal plane array

研制了用于 6 4× 6 4元InSb红外焦平面的几种读出电路。ISM 6 4× 6 4- 2型电路是采用直接注入模式 ,行积分工作的读出电路。ISM 6 4× 6 4- 3型电路仍然采用直接注入读出模式 ,行积分工作 ,但是增加了一级采样保持电路。ISM 6 4× 6 4- 4型电路采用直接注入模式 ,帧积分工作 ,因而可大大提高信噪比。描述了 2、3和 4型电路的结构 ,工作原理及版图设计特点 ,电路的制造工艺、测试方法及其主要性能。

Three kinds of readout integrated circuit for 64×64 InSb IR focal plane array have been designed and fabricated. The circuit ISM64×64-2 works in direct injection and line integration mode. ISM64×64-3 works in the same mode as ISM64×64-2, but was added one sample and hold circuit. ISM64×64-4 works in direct injection and frame integration mode, so the signal to noise was increased greatly. The scheme, operating principle, peculiarities of the layouts, fabrication process, testing methods and performance of the circuits were presented in this paper.