充入气体含水量对超高真空系统排气特性的影响

Influence of moisture content in venting gas on the pump-down characteristics of UHV system

在未烘烤的超高真空系统中 ,真空室表面所吸附的水蒸汽是影响排气时间及极限真空度的关键因素。通过实验 ,对充入气体中水蒸汽含量及操作方式与真空系统排气特性的关系进行了测试 。

The water absorbed on the surface of vacuum chamber dominates the pumping time and ultimate pressure in a unbaked out UHV system. The relation between moisture content in the venting gas, the operating techniques and the pump down curve has been tested in experiments. It can provide the basis of UHV system operation.