研磨轮结构参数对工件加工精度的影响

Lapping Wheel Structure and Machining Accuracy in Ultra-Precision Plane Lapping

通过建立研磨轮和工件的相对运动数学模型 ,得出研磨轮在工件上的切削运动轨迹方程 ,由此得到超精密平面研磨中 ,不同结构参数研磨轮的滑移轨迹长度。引入精度系数的概念 ,用于评价不同结构参数研磨轮对工件的加工效果。采用微粒金刚石研磨轮对单晶硅和压电陶瓷材料进行研磨实验的结果表明 。

The structure parameters of lapping wheel have great effect on machining accuracy in ultra-precision plane lapping. By establishing a relative motion calculation model between lapping wheel and workpiece, a cutting motion locus equation has been developed, and by calculating effective contacting length of one point on the surface of different structure lapping wheel, the machining accuracy coefficients of spiral and radial structure lapping wheels have been obtained to examine and judge the process effect of different structure lapping wheels on the workpiece. Analyzing the results of lapping experiments, it is obvious that the suitable structure parameters of lapping wheel can improve machining accuracy.