摘要
研究了ZAO靶材和纯ZnO的烧结过程 ,指出了两者在显微结构上的差别 ,并在此基础上 ,提出了两相粉体烧结模型。运用本模型 ,成功的解释了ZAO的显微结构形成的烧结机理。
A study was made on sintering of ZAO target and zinc oxide to indicate the difference of microstructures between ZAO and ZnO. Based on the study, a sintering model for two-phase powder was produced, which success - fully explained the sintering mechanism of forming ZAO microstructure.
出处
《粉末冶金技术》
EI
CAS
CSCD
北大核心
2002年第5期267-270,共4页
Powder Metallurgy Technology
关键词
ZAO陶瓷
烧结模型
烧结机理
Aluminum compounds
Microstructure
Models
Powders
Sintering
Zinc oxide
