光谱法测试计量光栅参数

The spectrum testing of the metrology grating

本文阐述光谱法测试计量光栅参数的方法,借助于测量计量光栅的功率谱强度及其相应量来推算光栅的栅距,振幅透过率分布及光栅开口比等一些光栅元件的重要参数,为研究光栅质量提供了部分依据。

The method for testing annd studying the grating spectrum is described. For the tested gratings, We can calculate their grating pitch, amplitude- transmission distribution,space and pitch rate, etc. through testing spectrum intensity and its position distribution of metrology gratings, and so some features of main parameters of grating elements are studied.