热气泡式微流体驱动器的研究进展

Review of Thermal Bubble Micro-actuators for Micro-fluidics

热气泡式微流体驱动器是微驱动的一个研究分支,是微流控器件的重要组成部分.热气泡式微流体驱动器没有机械可动部件和机械变形,结构简单、容易加工制造、可靠性高,在航空航天、生物医学和化学等领域具有广阔的应用前景.目前,热气泡式微流体驱动器主要采用4种加热方式:电阻加热、电磁感应加热、激光加热和电火花加热.对以上4种热气泡式微驱动器的研究进展进行了总结,分析了不同加热驱动方式的工作原理、结构组成、微加工制作方法、实验测试结果和驱动特点,并对今后热气泡式微驱动器的发展趋势及研究方法进行了分析.

Thermal bubble micro-actuator is one branch of MEMS actuators and is also an importantdriving method for micro-fluidics. There are no moveable mechanical parts and any mechanicaldeformation in the thermal bubble micro-actuator for micro-fluidics. Additionally, the structure of thethermal bubble micro-actuator is simple, and it is easily fabricated and has better reliability. Therefore,the thermal bubble micro-actuator has a broad prospect application in aerospace, biomedical, andchemical. Four heating methods are currently adopted by the thermal bubble micro-actuator for micro-fluidics. They are micro resistor heater, micro induction heater, laser heater, and spark heater. Thispaper summarizes the new researches of the micro-actuators for micro-fluidics with different heatingmethods. The principles, structures, micro fabrications, experimental results and characteristics ofdifferent micro-actuators studied recently are introduced. Then, the trend of development and researchmethod of micro-actuators for micro-fluidics are also analyzed.Key words: micro-actuators; thermal bubble; micro-fluidics;